Figure of merit for environmental SEM and its implications.

A recently introduced figure of merit for environmental and low vacuum scanning electron microscopes has now been computed in the full operational pressure range for one commercial instrument. The direct simulation Monte Carlo method has been used in lieu of experimental measurements. The theory of this figure of merit is further consolidated. It is shown that a thin pressure limiting aperture can indeed be used as an optimum reference system for all instruments employing differential pumping in the transfer of an electron beam from high vacuum to high pressure. The implications of the results obtained are discussed both in relation to existing commercial instruments and associated literature to pave the way for future progress in the field.